CrossBeam® Workstations (FIB-SEM) from Carl Zeiss
AURIGA®
Information Beyond Resolution
Unique Imaging | Precise Processing | Advanced Analytics | Future Assured
Key components of the AURIGA® CrossBeam®:
GEMINI® electron optical column (center), focused ion
beam (left) and gas injection system (right).
Carl Zeiss SMT
Nano Technology Systems Division
1µm
Layer stack of a Cd Te based thin film solar cell prepared
by focused ion beam. Courtesy of Prof. W. Jaegermann,
TU Darmstadt, Germany.
Carl Zeiss NTS GmbH
A Carl Zeiss SMT AG Company
Carl-Zeiss-Str. 56
73447 Oberkochen, Germany
Tel. + 49 73 64 / 20 44 88
Fax + 49 73 64 / 20 43 43
info-nts@smt.zeiss.com
Carl Zeiss SMT Ltd.
511 Coldhams Lane
Cambridge CB1 3JS, UK
Tel. + 44 12 23 41 41 66
Fax + 44 12 23 41 27 76
info-uk@smt.zeiss.com
1µm
Cross section through the front contact of a Si
wafer-based solar cell. Courtesy of Dr. F. Machalett,
ersol Solar Energy AG, Erfurt, Germany.
We make it visible.
